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Basic elements

Cleanroom Design Flow Chart

 Process Layout Approach

 

 Parts of the Cleanroom

FAB Clean Room

HVAC

Make-UP Air, Recirculation Air, Temp & RH Control, Exhaust, Diff Pressure, Chilled Water, Steam Sytem, Air Velocity, Air Change Rate

Archi

Raised Floor, EQ Layout, Vibration, Partion, Static Elec, Magnetic Interference

Land

Soil Drilling, Soil Analysis, Vibration Meas

Public Utility

City Water, Power System, Road Transportation, Gas Line

Environment

Clean Room Management, House Keeping, Air Shower, Noise Control

Safety

Fire Alarm, Gas Detection, Safety Corridor, Fire Wall, Emergency Shower, Paging, Communication, Breathing Air

Power

High Tension Power, EQ Power, Lighting Power, Emergency Power, UPS

Facility

Supply, Chemical Disgense, Gas Supply, Process Cooling Water, Drain, Waste Water Treat, Waste Reclaim, Plant Vacuum

 

Cleanroom features

Environment Conditions

Cleanliness, Temperature, Humidity, Pressure, Vibration, Noise, Easy to Clean and No Smell

Flexible Space

Static Elimination, Monitoring System, Standardized Cleaning, Rationalization Moving Lines

Prevention for Public Hazard & Disaster

Exhaust Gas Treatments Equipment, Wastewater Treatments Equipment, Poison Gas Dilution System, Noise Prevention and Countermeasures, Easy to Maintain, Evacuation Path Signal Board, Fire System, Emergency Shower, Eyewash System, Toxic Gas Detection System, Shockpro of Countermeasures

Continuous Opetation

Back-up System, Power Failure Protection Equipment, Central Monitoring System, Energy Saving Plan

 

Basic Consideration of Cleanroom

Basic Consideration

Problems

Environment

Base Size Too Small, Environmental Regulation, Factory Exhaust

Transport

Distance from The Highway, Distance From the Airport and Por, Distance from The Materials Supplier

Natural Condition

 Temperature and Humidity, Raining and Snowing, The Wind from Beach Side, Earthquake

Cleanliness Class

Why Need A Cleanroom, The Most Suitable Level, Temperature and Humidity Requirement, Vibration, Noise, Electromagnetic

Export

Location of Factory, Scalability of Equipment, Size Based on Demand, Operation Safety

Hydropower

Quality of The Water, The Capacity of Water & Electrical Supply, Supply Source Distance, Voltage Magnitude

Move In Plan

Staff & Equipment, Appropriate Structure, Emergency Plan

Staff

 Manpower, Engineer, Education, Health Care and Culture

 
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